A method for manufacturing a surface acoustic wave apparatus decreases a specific resistance of an electrode film by removing hydrogen occluded in the electrode film that is primarily composed of tantalum, so that the device properties are stabilized. An electrode film primarily composed of tantalum...http://www.google.fr/patents/US6725513?utm_source=gb-gplus-shareBrevet US6725513 - Method for manufacturing surface acoustic wave apparatus
Method for manufacturing surface acoustic wave apparatus
