In some aspects, a method is provided for enhancing electronic device manufacturing throughput within an electronic device manufacturing tool. The method includes the steps of (1) for the electronic device manufacturing tool, creating an electronic device manufacturing schedule based on process factors...http://www.google.fr/patents/US7477956?utm_source=gb-gplus-shareBrevet US7477956 - Methods and apparatus for enhancing electronic device manufacturing throughput
Methods and apparatus for enhancing electronic device manufacturing throughput
