A apparatus for removing deposits from within a space at least partially delimited by a surface which is subject to attack from a plasma including a surface cover comprising a material which is inert to the plasma. ...http://www.google.fr/patents/US5810936?utm_source=gb-gplus-shareBrevet US5810936 - Plasma-inert cover and plasma cleaning process and apparatus employing same
Plasma-inert cover and plasma cleaning process and apparatus employing same ...
