A projection objective of a microlithographic projection exposure apparatus contains a plurality of optical elements arranged in N≧2 successive sections A1 to AN of the projection objective which are separated from one another by pupil planes or intermediate image planes. According to the invention,...http://www.google.fr/patents/US8064041?utm_source=gb-gplus-shareBrevet US8064041 - Projection objective for a microlithographic projection exposure apparatus
Projection objective for a microlithographic projection exposure apparatus
