An information processing apparatus used for an exposure system. The apparatus includes a generation unit which generates a parameter file described in a markup language based on a parameter used in the exposure system, the parameter file including information for displaying an image concerning at least...http://www.google.fr/patents/US7016755?utm_source=gb-gplus-shareBrevet US7016755 - Information processing method and apparatus used in an exposure system and exposure apparatus
Information processing method and apparatus used in an exposure system and ...
