An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam source, and projecting an image of a secondary electron beam emitted by the irradiation of the primary electron...http://www.google.fr/patents/US20020036264?utm_source=gb-gplus-shareBrevet US20020036264 - Sheet beam-type inspection apparatus
Numéro de demande: 09/891,612 Numéro de publication: US 2002/0036264 A1 Date de dépôt: 27 juin 2001 Brevet délivré: US7049585 ( Date de délivrance 23 mai 2006)
