A semiconductor memory device includes a semiconductor substrate in which a cell region and a core and peripheral region are defined. The device further comprises isolation layers formed in the semiconductor substrate to define active regions, a first gate electrode structure formed in the cell region...http://www.google.fr/patents/US7462899?utm_source=gb-gplus-shareBrevet US7462899 - Semiconductor memory device having local etch stopper and method of manufacturing the same
Semiconductor memory device having local etch stopper and method of ...
