A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source...http://www.google.fr/patents/US7812963?utm_source=gb-gplus-shareBrevet US7812963 - Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
Interferometry method for ellipsometry, reflectometry, and scatterometry ...
