A process system for processing a semiconductor wafer or other similar flat workpiece has a head including a workpiece holder. A motor in the head spins the workpiece. A head lifter lowers the head to move the workpiece into a bath of liquid in a bowl. Sonic energy is introduced into the liquid and travels...http://www.google.fr/patents/US20030056814?utm_source=gb-gplus-shareBrevet US20030056814 - Sonic immersion process system and methods
Numéro de demande: 10/200,043 Numéro de publication: US 2003/0056814 A1 Date de dépôt: 19 juil. 2002 Brevet délivré: US6774056 ( Date de délivrance 10 août 2004)
