When the position of a stage is detected by interferometers, a converting means converts information detected by the interferometers into information on a position and a velocity of a center of gravity of the stage concerning each of degrees of freedom. PI controllers provided for each of the degrees...http://www.google.fr/patents/US5883702?utm_source=gb-gplus-shareBrevet US5883702 - Stage driving exposure apparatus wherein the number of driving devices exceeds the degrees of freedom of the stage
Stage driving exposure apparatus wherein the number of driving devices ...
