The present invention facilitates semiconductor device fabrication by providing mechanisms for utilizing different isolation schemes within embedded memory and other logic portions of a device. The isolation mechanism of the embedded memory portion is improved relative to other portions of the device...http://www.google.fr/patents/US7141468?utm_source=gb-gplus-shareBrevet US7141468 - Application of different isolation schemes for logic and embedded memory
Application of different isolation schemes for logic and embedded memory
