The invention is directed to an arrangement for generating pulsed currents for gas discharge pumped radiation sources, particularly with high repetition rates and high current strengths for generating plasma emitting EUV radiation. The object of the invention, to find a novel possibility for generating...http://www.google.fr/patents/US7072370?utm_source=gb-gplus-shareBrevet US7072370 - Arrangement for generating pulsed currents with a high repetition rate and high current strength for gas discharge pumped radiation sources
Arrangement for generating pulsed currents with a high repetition rate and ...
