In accordance with an aspect of the present invention, a wireless substrate-like sensor is configured to ensure it does not contaminate a semiconductor processing chamber. The sensor is sealed except for one or more apertures. In one embodiment, a vent is disposed proximate the apertures. In another...http://www.google.fr/patents/US20050224899?utm_source=gb-gplus-shareBrevet US20050224899 - Wireless substrate-like sensor
