An electrically programmable antifuse element incorporates a composite interlayer of dielectric material and amorphous silicon interposed between two electrodes. The lower electrode may be formed from a refractory metal such as tungsten. Preferably, a thin layer of titanium is deposited over the tungsten...http://www.google.fr/patents/US5070384?utm_source=gb-gplus-shareBrevet US5070384 - Electrically programmable antifuse element incorporating a dielectric and amorphous silicon interlayer
Electrically programmable antifuse element incorporating a dielectric and ...
