A substrate alignment apparatus which aligns and fixes a substrate on a substrate stage includes a chucking pad fixed on the substrate stage to chuck and fix the substrate, a moving unit which moves the substrate with respect to the substrate stage such that a mark on the substrate stage and a mark on...http://www.google.fr/patents/US7312849?utm_source=gb-gplus-shareBrevet US7312849 - Substrate alignment apparatus and method, and exposure apparatus
Substrate alignment apparatus and method, and exposure apparatus
