An irregularity defect inspection apparatus for inspecting an object to be inspected having a repeated pattern composed of regularly arranged unit patterns on the surface thereon to detect an irregularity defect occurring in the repeated pattern. The apparatus includes a light source apparatus having...http://www.google.fr/patents/US7355691?utm_source=gb-gplus-shareBrevet US7355691 - Defect inspection apparatus and defect inspection method
Defect inspection apparatus and defect inspection method
