A thin-film ROM device includes an array of open circuit and closed-circuit cells (5 to 8) formed from a stack of thin films (12,21,22,23,11) on a glass or other substrate (10). The semiconductor films (21,22,23) may be of hydrogenated amorphous silicon. At least one of the semiconductor films (21,22,23)...http://www.google.fr/patents/US5272370?utm_source=gb-gplus-shareBrevet US5272370 - Thin-film ROM devices and their manufacture
