An array of thermal sensitive elements (16) may be formed from a pyroelectric substrate (46) having an infrared absorber and common electrode assembly (18) attached thereto. A first layer of electrically conductive contacts (60) is formed to define in part masked (61) and unmasked (68)...http://www.google.fr/patents/US5792377?utm_source=gb-gplus-shareBrevet US5792377 - Method and structure for forming an array of thermal sensors
Method and structure for forming an array of thermal sensors