A semiconductor processing chamber includes a substrate support member on which the substrate is positioned during processing in the chamber. To align the substrate on the substrate support member, an alignment member extends about the perimeter of the substrate receiving portion of the support...http://www.google.fr/patents/US5673922?utm_source=gb-gplus-shareBrevet US5673922 - Apparatus for centering substrates on support members
Apparatus for centering substrates on support members
