A thin film piezoelectric (PZT) micro-actuator is disclosed. Two thin film pieces of PZT are couple to a slider support frame. The slider support frame has a slider support connected by a leading beam to a base. The two thin film pieces of PZT connect the slider support to the base. Applied voltage causes...http://www.google.fr/patents/US7525769?utm_source=gb-gplus-shareBrevet US7525769 - Micro-actuator having swing support to allow horizontal swinging movement of slider support
Micro-actuator having swing support to allow horizontal swinging movement of ...
