This invention relates to apparatus for sensing, remotely, the temperature of a semi-conductor wafer and includes means for shining a single frequency light 11 onto the surface 12 of a semi-conductor wafer 13 so that some of that light is scattered. The scattered light is focused by a lens...http://www.google.fr/patents/US5755512?utm_source=gb-gplus-shareBrevet US5755512 - Temperature sensing methods and apparatus
