A method of forming a buried digit line is disclosed. Sacrificial spacers are formed along the sidewalls of an isolation trench, which is then filled with a sacrificial material. One spacer is masked while the other spacer is removed and an etch step into the substrate beneath the removed spacer forms...http://www.google.fr/patents/US7229895?utm_source=gb-gplus-shareBrevet US7229895 - Memory array buried digit line
