A new method and structure is provided for the creation of interconnect lines. The cross section of the interconnect lines of the invention, taken in a plane that is perpendicular to the longitudinal direction of the interconnect lines, is a triangle as opposed to the conventional square or rectangular...http://www.google.fr/patents/US6815823?utm_source=gb-gplus-shareBrevet US6815823 - Copper metal structure for the reduction of intra-metal capacitance
Copper metal structure for the reduction of intra-metal capacitance
