Described are methods and apparatus for collecting measured parameter data for applications such as deriving response models and information required for developing and maintaining processes and process tools. The methods and apparatus are capable of deriving correction factors for the measured data...http://www.google.fr/patents/US20020177917?utm_source=gb-gplus-shareBrevet US20020177917 - Data collection and correction methods and apparatus
Data collection and correction methods and apparatus
Numéro de demande: 10/126,457 Numéro de publication: US 2002/0177917 A1 Date de dépôt: 19 avr. 2002 Brevet délivré: US6738722 ( Date de délivrance 18 mai 2004)
