An electromagnetic radiation diffuser, operative at extreme ultraviolet (EUV) wavelengths, is fabricated on a substrate. The diffuser comprises a randomized structure having a peak and valley profile over which a highly reflective coating is evaporated. The reflective coating substantially takes the...http://www.google.fr/patents/US7002747?utm_source=gb-gplus-shareBrevet US7002747 - Diffuser plate and method of making same
