A method of transporting a reticle is disclosed. The reticle is placed in a reticle carrier that has an ionizer. Moreover, the reticle may be attached with a pellicle. The pellicle consists of a pellicle frame and a pellicle film stretched over the pellicle frame. The pellicle frame has included within...http://www.google.fr/patents/US20010005944?utm_source=gb-gplus-shareBrevet US20010005944 - Reduced particle contamination manufacturing and packaging for reticles
Reduced particle contamination manufacturing and packaging for reticles
Numéro de demande: 09/737,139 Numéro de publication: US 2001/0005944 A1 Date de dépôt: 13 déc. 2000 Brevet délivré: US6732746 ( Date de délivrance 11 mai 2004)
