The invention includes a method of depositing a noble metal. A substrate is provided. The substrate has a first region and a second region. The first and second regions are exposed to a mixture comprising a precursor of a noble metal and an oxidant. During the exposure, a layer containing the noble metal...http://www.google.fr/patents/US6773984?utm_source=gb-gplus-shareBrevet US6773984 - Methods of depositing noble metals and methods of forming capacitor constructions
Methods of depositing noble metals and methods of forming capacitor ...
