A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly...http://www.google.fr/patents/US7298471?utm_source=gb-gplus-shareBrevet US7298471 - Surface inspection apparatus and surface inspection method
Surface inspection apparatus and surface inspection method
