A semiconductor system (10) has a computer (16) coupled to equipment (14) for processing semiconductor wafers. The computer (16) has a CPU (18) for controlling and manipulating computer information, and a memory (16). A portion of the memory (14) stores programs, and is referred to as system code (17)....http://www.google.fr/patents/US5375229?utm_source=gb-gplus-shareBrevet US5375229 - System and method for adding a control function to a semiconductor equipment system
System and method for adding a control function to a semiconductor equipment ...
