End-effectors may be used to grasp microelectronic workpieces for handling by automated transport devices. One such end-effector includes a plurality of end-effectors and a detector adapted to detect engagement of the edge of the workpiece by at least one of the abutments. An alternative end-effector...http://www.google.fr/patents/US7281741?utm_source=gb-gplus-shareBrevet US7281741 - End-effectors for handling microelectronic workpieces
End-effectors for handling microelectronic workpieces
