Memory cell having a floating gate with lateral edges which are aligned directly above edges of the active area in the substrate, a control gate positioned directly above the floating gate, and a select gate spaced laterally from the control gate. The floating gate has a bottom wall and side walls which...http://www.google.fr/patents/US6184554?utm_source=gb-gplus-shareBrevet US6184554 - Memory cell with self-aligned floating gate and separate select gate, and fabrication process
Memory cell with self-aligned floating gate and separate select gate, and ...