A semiconductor substrate is provided with alignment marks for recognizing and deciding positions of registration of a wafer and a mask in a photolithographic step that is included in a process of manufacturing a semiconductor device. The alignment marks, X alignment marks and Y alignment marks in a...http://www.google.fr/patents/US4981529?utm_source=gb-gplus-shareBrevet US4981529 - Semiconductor substrate provided with marks for alignment even under a resist film
Semiconductor substrate provided with marks for alignment even under a ...
