Methods of and systems for balancing the capacitance of a common series capacitive circuit in a semiconductor-based sensor, such as a humidity sensor, are described. Relative humidity sensors can provide measurements via a series capacitive circuit including a humidity-sensitive dielectric separating...http://www.google.fr/patents/US6867602?utm_source=gb-gplus-shareBrevet US6867602 - Methods and systems for capacitive balancing of relative humidity sensors having integrated signal conditioning
Methods and systems for capacitive balancing of relative humidity sensors ...
