A semiconductor device comprising a capacitive element which is provided above the semiconductor substrate and which has a capacitive insulation film held between an upper electrode and a lower electrode, a conductor for upper electrode which is connected to the upper electrode, a side-wall adsorbent...http://www.google.fr/patents/US7504684?utm_source=gb-gplus-shareBrevet US7504684 - Semiconductor device and manufacturing method therefor
Semiconductor device and manufacturing method therefor
