A microwave plasma processing apparatus 100 allows microwaves, passed through a plurality of slots 37, to be transmitted through a plurality of dielectric parts 31 supported by beams 26, raises a gas to plasma with the transmitted microwaves and processes a substrate G with the plasma. The beams 26 are...http://www.google.fr/patents/US7432468?utm_source=gb-gplus-shareBrevet US7432468 - Plasma processing apparatus and plasma processing method
Plasma processing apparatus and plasma processing method
