In accordance with the present invention, a dielectric barrier layer is presented. A barrier layer according to the present invention includes a densified amorphous dielectric layer deposited on a substrate by pulsed-DC, substrate biased physical vapor deposition, wherein the densified amorphous dielectric...http://www.google.fr/patents/US7262131?utm_source=gb-gplus-shareBrevet US7262131 - Dielectric barrier layer films
