Methods for preparing organic thin films on substrates, the method comprising the steps of providing a plurality of organic precursors in the vapor phase, and reacting the plurality or organic precursors at a sub-atmospheric pressure. Also included are thin films made by such a method and apparatuses...http://www.google.fr/patents/US6337102?utm_source=gb-gplus-shareBrevet US6337102 - Low pressure vapor phase deposition of organic thin films
Low pressure vapor phase deposition of organic thin films
