Process control monitors are disclosed that are produced using at least some of the same process steps used to manufacture a MEMS device. Analysis of the process control monitors can provide information regarding properties of the MEMS device and components or sub-components in the device. This information...http://www.google.fr/patents/US7618831?utm_source=gb-gplus-shareBrevet US7618831 - Method of monitoring the manufacture of interferometric modulators
Method of monitoring the manufacture of interferometric modulators
