A chemical mechanical planarization tool and method are presented employing a non-linear motion of the carrier arm relative to the polishing pad. The non-linear motion of the carrier arm relative to the polishing pad can be accomplished in a variety of ways, for example, employing a mechanical template...http://www.google.fr/patents/US5549511?utm_source=gb-gplus-shareBrevet US5549511 - Variable travel carrier device and method for planarizing semiconductor wafers
Variable travel carrier device and method for planarizing semiconductor wafers
