A treatment pattern (such as a focused spot, an image, or an interferogram) projected on a treatment target may lose precision if the treatment beam must pass through a birefringent layer before reaching the target. In the general case, the birefringent layer splits the treatment beam into ordinary and...http://www.google.fr/patents/US8159671?utm_source=gb-gplus-shareBrevet US8159671 - Spatially precise optical treatment for measurement of targets through intervening birefringent layers
Spatially precise optical treatment for measurement of targets through ...
