A silicon on insulator structure and method of making the structure. A high purity, substantially defect free silicon wafer is the basis for forming a final thin silicon layer on an insulator layer, the silicon having substantially the same chemical and structural state as the starting silicon wafer....http://www.google.fr/patents/US5136344?utm_source=gb-gplus-shareBrevet US5136344 - High energy ion implanted silicon on insulator structure
High energy ion implanted silicon on insulator structure
