It is an object of the present invention to provide a touch mode capacitive pressure sensor having higher pressure durability than conventional sensors. In this invention, a touch mode capacitive pressure sensor has a diaphragm made from boron-doped silicon, and the boron concentration at the top face...http://www.google.fr/patents/US6860154?utm_source=gb-gplus-shareBrevet US6860154 - Pressure sensor and manufacturing method thereof
