A probe driving method and a probe apparatus for bringing a probe into contact with the surface of a sample in a safe and efficient manner by monitoring the probe height. Information about the height of the probe from the sample surface is obtained by detecting a probe shadow (54) appearing immediately...http://www.google.fr/patents/US20030184332?utm_source=gb-gplus-shareBrevet US20030184332 - Probe driving method, and probe apparatus
Numéro de demande: 10/296,887 Numéro de publication: US 2003/0184332 A1 Date de dépôt: 29 nov. 2002 Brevet délivré: US6960765 ( Date de délivrance 1 nov. 2005)
