A semiconductor system includes a body defining a processing chamber, a holder disposed within the processing chamber to support the substrate, and a fluid injection assembly to facilitate sequential deposition of films. In one embodiment, the fluid injection assembly is coupled to the body and includes...http://www.google.fr/patents/US20020121241?utm_source=gb-gplus-shareBrevet US20020121241 - Processing chamber and method of distributing process fluids therein to facilitate sequential deposition of films
Processing chamber and method of distributing process fluids therein to ...
