An illumination intensity adjustment device includes a plurality of blades disposed in the projection beam so as to cast half-shadows extending across the illumination field. The blades can be selectively rotated to increase their width perpendicular to the projection beam to control uniformity. ...http://www.google.fr/patents/US20030063266?utm_source=gb-gplus-shareBrevet US20030063266 - Lithographic apparatus and device manufacturing method
Lithographic apparatus and device manufacturing method
Numéro de demande: 10/235,854 Numéro de publication: US 2003/0063266 A1 Date de dépôt: 6 sept. 2002 Brevet délivré: US6741329 ( Date de délivrance 25 mai 2004)
