A spatial frequency filter used in a pattern defect detection device, including a pattern which includes a black spot having a diameter expanded by a controlled amount in comparison with the diameter of a black spot on a photosensitive plate obtained by exposure by diffracted light from a pattern on...http://www.google.fr/patents/US5379150?utm_source=gb-gplus-shareBrevet US5379150 - Method of manufacturing a spatial frequency filter for use in a pattern defect detection device
Method of manufacturing a spatial frequency filter for use in a pattern ...
