Erosion of material in an electrode in a plasma-produced extreme ultraviolet (EUV) light source may be reduced by treating the surface of the electrode. Grooves may be provided in the electrode surface to increase re-deposition of electrode material in the grooves. The electrode surface may be coated...http://www.google.fr/patents/US7446329?utm_source=gb-gplus-shareBrevet US7446329 - Erosion resistance of EUV source electrodes
