An interference-based MEMS device having a lower substrate including a substrate electrode; a lower membrane spaced apart from the lower substrate by a lower gap, the lower membrane including a lower membrane electrode; an upper membrane located on a side of the lower membrane opposite the lower substrate...http://www.google.fr/patents/US7957049?utm_source=gb-gplus-shareBrevet US7957049 - Highly reflective MEMS device
