A capacitive differential pressure sensing device with pressure overrange protection and a method of making the same are described. The device employs a doped polysilicon diaphragm overlying a cavity in a doped single crystal silicon wafer having a port extending into the cavity from the opposite side....http://www.google.fr/patents/US5323656?utm_source=gb-gplus-shareBrevet US5323656 - Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
