A driver for use with a micro-electromechanical system (MEMS) device, method of operation thereof and a MEMS device employing the driver and method. In one embodiment, the driver includes an actuation subsystem that provides an actuation voltage to alter an angle of an optical element of the MEMS device....http://www.google.fr/patents/US20020093722?utm_source=gb-gplus-shareBrevet US20020093722 - Driver and method of operating a micro-electromechanical system device
Driver and method of operating a micro-electromechanical system device
Numéro de demande: 09/727,557 Numéro de publication: US 2002/0093722 A1 Date de dépôt: 1 déc. 2000 Brevet délivré: US6504641 ( Date de délivrance 7 janv. 2003)
